Digital guide
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AMAT 0020-06203
- Product Name: Ceramic Isolator Cylinder
- Product Description: High-purity alumina ceramic cylinder providing electrical isolation and structural support for high-voltage components within semiconductor process chambers. It delivers robust insulation in RF and plasma-rich environments while maintaining ultra-high vacuum compatibility.
- Technical Specifications:
- Material: 99.6% High-Purity Alumina (Al₂O₃)
Detailed content
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- Dimensions: 50mm OD × 40mm ID × 75mm Height
- Dielectric Strength: >20 kV/mm
- Maximum Operating Temperature: 1700°C
- Compressive Strength: >2000 MPa
- Surface Finish: Ra < 0.8 μm
- Weight: 0.32 kg
- Functional Features:
- Superior electrical insulation for high-voltage RF systems
- Non-contaminating, low-outgassing properties for UHV conditions
- Exceptional resistance to plasma erosion and chemical corrosion
- High thermal stability under extreme thermal cycling
- Precision machining for tight dimensional tolerances
- High mechanical strength to support heavy electrode assemblies
- Applications: Electrical isolation and structural support for RF coils, electrode mounts, and high-voltage feedthroughs in PVD, CVD, and Etch chambers across Centura and Endura platforms.
