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AMAT 0020-34831
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Product Name: RF/HV Mounting Plate with Interlock
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Product Description: Integrated mounting plate for RF/high-voltage components featuring built-in safety interlock mechanisms. It secures high-voltage assemblies while providing interlock signals to ensure operator safety during maintenance.
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Technical Specifications:
- Material: 6061-T6 Aluminum Alloy
Detailed content
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- Finish: Black Anodized
- Dimensions: 200mm × 150mm × 15mm
- Interlock Switches: 2 × SPDT mechanical safety switches
- Mounting Interface: Standard 19-inch rack and chamber wall compatible
- Voltage Rating: 5 kV DC
- Operating Temperature: 0°C to +60°C
- Weight: 2.1 kg
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Functional Features:
- Integrated safety interlocks for high-voltage component access
- Robust construction for heavy RF and HV components
- Precision alignment features for optimal impedance matching
- Interlock status indicators for quick diagnostics
- Shielded design to prevent RF interference
- Easy-to-install, drop-in replacement design
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Applications: Safety-interlocked mounting for RF match networks, high-voltage power supplies, and electrode biasing assemblies in P5000 and Centura Etch platforms; essential for compliance with SEMI S2 safety standards.
