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AMAT 1150-00203
Product Name: Solenoid Valve Manifold Assembly
Product Description: A multi-channel pneumatic manifold integrated with high-purity solenoid valves for precise control of process gases, coolant lines, and pneumatic actuators in semiconductor production equipment.
Technical Specifications:
- Valve Type: 2-way or 3-way high-purity solenoid valves
Detailed content
- Operating Pressure: 0–150 PSI
- Voltage: 24V DC
- Response Time: <10 ms
- Seal Material: Chemically resistant perfluoroelastomer
- Leak Integrity: <1×10⁻⁹ atm-cc/sec He
Functional Features:
- Simultaneous control of multiple gas or air lines
- Fast and repeatable valve actuation
- Low power consumption and long service life
- Compact integrated design to save installation space
- High chemical compatibility with process media
- Easy maintenance and modular component replacement
Application Scenarios:
- Process gas delivery and shutoff control
- Pneumatic actuator and robot control
- Vacuum system venting and purging
- Chemical delivery system switching
- Semiconductor tool utility control modules
