Digital guide
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AMAT 0020-31723
Product Name: 200mm Poly Wafer Pedestal Assembly
Product Description: A precision-engineered wafer support pedestal designed for 200mm wafer processing in semiconductor deposition systems. It provides stable wafer positioning and thermal management during high-vacuum polycrystalline silicon deposition processes.
Technical Specifications:
- Wafer Compatibility: 200mm (8-inch) wafers with notch orientation
Detailed content
- Material: High-purity polycrystalline silicon
- Diameter: 218mm
- Surface Finish: Polished to Ra < 0.5 μm
- Thermal Conductivity: Optimized for uniform heat distribution
- Mounting: Precision alignment with chamber lift pins
- Vacuum Compatibility: Ultra-high vacuum (UHV) rated
Functional Features:
- Precise wafer centering and stability
- Excellent thermal uniformity across wafer surface
- Low outgassing for vacuum integrity
- Chemical inertness to deposition precursors
- Minimal particle generation
- Easy installation and replacement
Application Scenarios:
- Polycrystalline silicon deposition processes
- 200mm semiconductor wafer manufacturing
- Chemical Vapor Deposition (CVD) systems
- AMAT Centura and Producer platforms
- Semiconductor front-end-of-line (FEOL) processing
