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AMAT 0021-06961
Product Name: Insulator Sleeve Assembly
Product Description: A cylindrical ceramic sleeve providing electrical isolation and mechanical protection for electrodes, shafts, and feedthroughs inside semiconductor vacuum chambers. It prevents arcing and maintains chamber purity.
Technical Specifications:
- Material: High-purity macor or alumina ceramic
Detailed content
- Dielectric Strength: ≥18 kV/mm
- Temperature Range: -50°C to +1000°C
- Wall Thickness: Precision-machined to tight tolerances
- Surface Finish: Smooth polished to minimize particle traps
- Outgassing Rate: Ultra-low for UHV applications
Functional Features:
- Effective electrical insulation in high-voltage environments
- High mechanical strength and wear resistance
- Chemical inertness to process gases and plasmas
- Low outgassing to preserve vacuum quality
- Dimensional stability under thermal cycling
- Non-contaminating for advanced wafer processes
Application Scenarios:
- Plasma chamber electrode isolation
- Vacuum feedthrough protection
- Shaft and pin insulation in wafer handling systems
- RF component isolation
- High-purity semiconductor processing tools
