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AMAT 0021-17718
Product Name: Quartz Gas Injector Liner
Product Description: A high-purity quartz liner integrated into gas injection systems to ensure clean, uniform gas delivery while resisting chemical attack and thermal stress in semiconductor process chambers.
Technical Specifications:
- Material: High-purity synthetic quartz glass
Detailed content
- Temperature Resistance: Up to 1200°C
- Transmission: High optical transparency for process monitoring
- Dimensional Accuracy: ±0.03 mm
- Hydroxyl Content: Ultra-low to prevent contamination
- Chemical Resistance: Inert to most process chemistries
Functional Features:
- High thermal shock resistance
- Non-porous surface to avoid particle trapping
- Low metallic contamination risk
- Optimized flow geometry for uniform gas distribution
- Easy cleaning and regeneration
- Long service life under plasma exposure
Application Scenarios:
- PECVD and ALD gas injection systems
- Plasma etch chamber gas distribution
- Wafer cleaning and oxide removal processes
- Semiconductor front-end-of-line (FEOL) processing
- High-purity vacuum deposition equipment
