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AMAT 0100-00008
Product Name: TC Gauge PWB Assembly
Product Description: A printed wiring board assembly dedicated to processing signals from thermocouple (TC) vacuum gauges in semiconductor equipment. It provides accurate pressure measurement and signal conditioning for vacuum chamber monitoring.
Technical Specifications:
- Input: Thermocouple vacuum gauge signals
Detailed content
- Output: Conditioned analog or digital pressure readings
- Power Supply: 24V DC
- Operating Temperature: 0°C to +60°C
- Board Dimensions: Standard AMAT PCB form factor
- Communication: RS-485 or analog output interface
Functional Features:
- High-precision thermocouple signal amplification
- Noise filtering for accurate pressure measurement
- Over-voltage and short-circuit protection
- Real-time pressure data processing
- Compatibility with AMAT vacuum monitoring systems
- Status indication for diagnostics
Application Scenarios:
- Vacuum chamber pressure monitoring
- Semiconductor process vacuum control
- PVD, CVD, and etch chamber instrumentation
- AMAT Centura and Endura platform vacuum systems
- Factory automation vacuum monitoring
