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AMAT 0120-64569
- Product Name: AMAT 0120 – 64569 Semiconductor Wafer Handling Robot End – Effector
- Product Introduction: In semiconductor fabs, wafer handling robots are used to transfer wafers between different process stations, storage cassettes, and inspection equipment. The end – effector is the part of the robot that directly contacts the wafer, and its design and performance are crucial for safe and reliable wafer handling.
- Technical Specifications:
- Wafer Size Compatibility: Designed to handle specific wafer sizes, commonly 200 mm and 300 mm wafers. It may have adjustable features to accommodate slight variations in wafer diameter or thickness.
Detailed content
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- Material: Usually made from non – contaminating materials such as high – purity aluminum or engineering plastics. These materials do not introduce particles or chemical impurities to the wafer surface during handling.
- Contact Force: Can apply a controlled and precise contact force to the wafer to ensure secure grip without causing damage. The contact force is typically in the range of a few grams to a few hundred grams, depending on the wafer size and fragility.
- Functional Features:
- Soft Contact Design: Incorporates soft contact elements, such as rubber pads or foam inserts, at the points of contact with the wafer. These soft elements help to distribute the contact force evenly and reduce the risk of wafer breakage or scratching.
- Vacuum Grip Option: Some end – effectors may use a vacuum grip mechanism to hold the wafer. A vacuum pump creates a negative pressure between the end – effector and the wafer surface, providing a secure and reliable grip. The vacuum level can be precisely controlled to ensure proper wafer handling.
- Alignment Features: May include alignment features such as pins or guides to ensure that the wafer is properly positioned on the end – effector before transfer. This helps to prevent misalignment during the transfer process, which could lead to process errors or wafer damage.
- Application Scenarios: Mounted on wafer handling robots in semiconductor fabs. It is used to pick up wafers from storage cassettes, transfer them to process chambers for various manufacturing steps such as deposition, etching, and photolithography, and then place them back into cassettes or onto inspection equipment.
