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AMAT 0120-93660
Product Name: Flow Control Solenoid Valve Manifold
Product Description: Integrated multi-station manifold assembly with solenoid valves for regulating process and purge gas flows in semiconductor gas delivery systems.
Technical Specifications:
- Valve Configuration: 2-way normally closed solenoid valves
Detailed content
- Operating Pressure: 20 to 150 PSIG
- Seal Material: Perfluoroelastomer for chemical compatibility
- Voltage: 24V DC
- Connection: 1/4″ VCR face-seal fittings
Functional Features:
- Provides fast and reliable gas flow switching
- Low internal volume minimizes gas retention and cross-contamination
- Sealed construction prevents atmospheric leakage into vacuum lines
- Pre-assembled and tested for leak-tight performance
Application Scenarios: Gas panels, purge systems, and process gas lines in CVD, PVD, and ALD tool installations.
