Digital guide
You are here:
AMAT 03-81723-00
Product Name: Chamber Seal Adapter Flange
Product Description: Precision-machined metal flange used to create vacuum-tight connections between chamber segments, feedthroughs, and external components.
Technical Specifications:
- Material: 316L electropolished stainless steel
Detailed content
- Surface Finish: Ra ≤0.4μm for vacuum sealing
- Mounting: Bolt-hole pattern with centering locator
- Seal Compatibility: Supports centering rings and metal gaskets
- Pressure Rating: Compatible with UHV conditions
Functional Features:
- Ensures zero virtual leaks in high-vacuum environments
- Maintains dimensional stability under thermal cycling
- Prevents particle generation through smooth passivated surfaces
- Ensures accurate alignment of connected chamber components
Application Scenarios: Vacuum flanging for pump ports, gas injection assemblies, viewports, and electrical feedthroughs on process chambers.
