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AMAT 0200-10176
Product Name: Quartz Focus Ring Assembly
Product Description: Contoured high-purity quartz ring that shapes gas distribution and plasma uniformity above the wafer, improving process consistency across the wafer surface.
Technical Specifications:
- Material: Low-metal synthetic fused quartz
Detailed content
- Profile: Precision-machined tapered inner geometry
- Flatness: ≤5μm total thickness variation
- Diameter Compatibility: Designed for 300mm wafer processes
- Edge Finish: Chamfered and polished to eliminate stress points
Functional Features:
- Enhances plasma confinement for uniform etching or deposition
- High transmittance for infrared and thermal energy transfer
- Resists micro-cracking under rapid thermal change
- Smooth surfaces reduce particulate accumulation
Application Scenarios: Producer, Centura, and Endura platforms for dielectric etch, epitaxy, and thin-film deposition processes.
