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AMAT 0020-90099
Product Name: High-Temperature Ceramic Insulator Spacer
Product Description: Precision-machined ceramic component used to maintain fixed spacing between conductive assemblies while providing electrical insulation in high-temperature vacuum environments.
Technical Specifications:
- Material: Boron nitride reinforced alumina ceramic composite
Detailed content
- Compressive Strength: ≥2000MPa
- Thermal Conductivity: Optimized for balanced heat distribution
- Vacuum Compatibility: Ultra-low outgassing under UHV conditions
- Form: Cylindrical spacer with precision bore and end faces
Functional Features:
- Maintains mechanical stability under thermal cycling and vibration
- Prevents electrical arcing between adjacent conductive components
- Non-contaminating material composition preserves wafer quality
- High wear resistance extends replacement intervals
Application Scenarios: Electrode assemblies, RF coil mounts, and high-voltage feedthrough installations in semiconductor process chambers.
