Digital guide
You are here:
AMAT 0040-38738
Product Name: Heater Jacket Assembly for Chamber Components
Product Description: Flexible heating assembly used to maintain controlled temperatures on gas lines, injectors, and chamber components to prevent condensation and process gas freezing.
Technical Specifications:
- Heating Type: Resistive flexible heater mat
Detailed content
- Temperature Range: Ambient to 150°C
- Power Rating: 120V AC / 240V AC configurable
- Temperature Control: Integrated thermocouple feedback
- Construction: Silicone rubber insulated jacket
Functional Features:
- Uniform heat distribution across target surfaces
- Fast heat response with minimal overshoot
- Resists chemical vapors commonly found in semiconductor fabs
- Flexible design conforms to curved and irregular surfaces
Application Scenarios: Gas line heating, precursor line tracing, and component warming in CVD and ALD systems using low-vapor-pressure precursors.
