Digital guide
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AMAT 0020-37214
Product Name: High-Purity Alumina Ceramic Isolator Ring
Product Description: A precision-machined ceramic ring providing electrical isolation and thermal stability for high-voltage components in process chambers.
Technical Specifications:
- Material: 99.8% high-purity alumina (Al₂O₃)
Detailed content
- Dielectric Strength: >18kV/mm
- Max Operating Temp: 1600°C
- Dimensional Tolerance: ±0.02mm
- Surface Finish: Ground to Ra < 0.8μm
Functional Features:
- Excellent electrical isolation in high-voltage RF fields.
- Superior thermal shock resistance during rapid process cycling.
- Chemically inert to plasma and process gases.
- Non-contaminating, low outgassing for UHV environments.
Application Scenarios: Isolation for RF electrodes, power feedthroughs, and high-voltage components in Etch and PECVD chambers.
