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AMAT 0010-39189
Product Name: 300mm Wafer Lift Pin Assembly
Product Description: A precision mechanical assembly designed to vertically lift and position 300mm wafers within semiconductor process chambers, ensuring safe and accurate transfer between the robot blade and process pedestal.
Technical Specifications:
- Material: 316L Stainless Steel (body), High-purity Alumina Ceramic (pin tip)
Detailed content
Quantity: 3-piece lift pin set
- Stroke Length: 25mm
- Vertical Repeatability: ±0.01mm
- Surface Finish: Electropolished (Ra ≤ 0.4μm)
- Temperature Rating: -20°C to +300°C
- Vacuum Compatibility: 10⁻⁹ Torr UHV rated
Functional Features:
- Low particle generation design for cleanroom compatibility
- Wear-resistant ceramic tips prevent wafer scratching
- Precision linear bearings for smooth, backlash-free motion
- Sealed construction to resist process gas corrosion
- Easy installation and alignment with standard mounting flanges
Application Scenarios: Wafer lifting and positioning in 300mm PVD (Endura), CVD (Centura), and Etch chambers during deposition, etching, and wafer transfer processes.
