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AMAT 3400-01068
Product Name: Stainless Steel Flanged Spiral Pipe
Product Description: A precision-formed, corrugated stainless steel pipe with flanged ends, designed for flexible, high-vacuum fluid and gas transfer in semiconductor utility systems.
Technical Specifications:
- Material: 316L Stainless Steel (electropolished)
Detailed content
- Outer Diameter: 40mm
- Length: 304.8mm
- Flange Type: NW40 (KF-40) quick-release
- Corrugation: Flexible spiral (304L SS liner)
- Pressure Rating: Full vacuum to 10 bar (gauge)
- Temperature Range: -50°C to +200°C
- Leak Rate: < 1×10⁻⁹ atm-cc/sec He
Functional Features:
- High flexibility for easy installation and vibration isolation
- Smooth, low-outgassing internal surface (Ra ≤ 0.5μm)
- Quick-release flanges for tool-less assembly
- Corrosion resistance to all semiconductor gases
- High burst pressure for safety compliance
Application Scenarios: Flexible vacuum and gas transfer lines connecting pumps, chambers, and gas cabinets in CMP (Mirra 3400) and other semiconductor processing systems.
