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AMAT 0090-00524
Product Name: Precision Pressure Transducer Module
Product Description: A high-accuracy analog pressure sensor module for measuring absolute and gauge pressure in high-purity gas delivery and vacuum control systems.
Technical Specifications:
- Pressure Range: 1 Torr to 1000 Torr (absolute)
Detailed content
- Output Signal: 0-5V DC analog
- Accuracy: ±0.25% full-scale
- Stability: ±0.1% per year
- Media Compatibility: All inert and corrosive process gases (N₂, O₂, Ar, SiH₄, NH₃)
- Wetted Materials: 316L VIM-VAR stainless steel, Hastelloy C-276
- Supply Voltage: 24V DC
- Operating Temperature: -10°C to +60°C
- Isolation: 1000V AC
Functional Features:
- High-precision piezoresistive sensing element
- Fully welded, leak-tight construction (leak rate < 1×10⁻⁹ atm-cc/sec He)
- Built-in temperature compensation for wide operating range
- Reverse polarity and short-circuit protection
- Compact, rugged design for space-constrained installations
Application Scenarios: Pressure monitoring in gas panels, vacuum lines, and process chambers on all major AMAT semiconductor manufacturing platforms.
