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AMAT 3700-02829
Product Name: High-Temperature Perfluoroelastomer O-Ring
Product Description: A precision-molded sealing ring manufactured from high-grade perfluoroelastomer (FFKM/Kalrez), designed for ultra-high vacuum and extreme temperature sealing in aggressive process environments.
Technical Specifications:
- Material: Kalrez 4079 (perfluoroelastomer)
Detailed content
- Hardness: 75 Shore A
- Inner Diameter: 220mm
- Cross-Section Diameter: 5.33mm (CSD 0.210″)
- Temperature Range: -20°C to +327°C continuous
- Chemical Compatibility: Inert to all process gases (F₂, Cl₂, NF₃, etc.)
- Vacuum Rating: 10⁻¹⁰ Torr
- Outgassing Rate: < 1×10⁻⁸ Torr-l/sec·cm²
Functional Features:
- Exceptional thermal stability in extreme high-temperature processes
- Zero particle generation for critical cleanroom applications
- Superior chemical resistance to plasma and corrosive gases
- Long service life with minimal compression set
- Precision-molded dimensions for consistent sealing
Application Scenarios: Static sealing for chamber lids, viewports, and flanges in high-temperature PVD, Etch, and ALD chambers where Viton and standard FKM seals fail.
