Digital guide
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AMAT 0195-10582
Product Name: AC Power Distribution Module
Product Description: A robust industrial power distribution unit that provides regulated, fused, and protected alternating current (AC) power to various sub-systems within a semiconductor manufacturing tool.
Technical Specifications:
- Input Voltage: 208V AC, 3-phase, 50/60Hz
Detailed content
- Output Circuits: 8 independent 120V AC circuits (15A each)
- Over-current Protection: Thermal-magnetic circuit breakers
- Surge Protection: 80kA peak, 2.5kV clamping voltage
- Isolation: 1500V AC input-to-output
- Monitoring: Voltage/current metering, fault indication
- Enclosure: NEMA 12, IP54 rated
- Operating Temperature: -10°C to +60°C
Functional Features:
- Individual circuit status LEDs for quick diagnostics
- Remote fault alarm contact (dry relay)
- Lockable breaker switches to prevent unauthorized operation
- EMI filtering on all output lines
- Compact rack-mount design for mainframe integration
Application Scenarios: Primary AC power distribution for robot controllers, vacuum pumps, gas panels, and I/O systems in AMAT 300mm wafer processing platforms.
