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AMAT 0200-00071
Product Name: 200mm Extended Quartz Insulating Pipe
Product Description: A high-purity fused quartz pipe that provides electrical isolation and thermal insulation for chamber components, while maintaining vacuum integrity in 200mm semiconductor process chambers.
Technical Specifications:
- Material: Synthetic fused silica (SiO₂, >99.998% purity)
Detailed content
- Length: 300mm (extended)
- Outer Diameter: 50mm
- Inner Diameter: 40mm
- Wall Thickness: 5mm
- Dielectric Strength: > 15kV/mm
- Maximum Operating Temperature: 1050°C
- Vacuum Rating: 10⁻⁸ Torr
Functional Features:
- Excellent electrical insulation for high-voltage components
- Low thermal conductivity for effective thermal isolation
- Non-contaminating, ultra-low outgassing properties
- High chemical resistance to plasma etchants
- Precision dimensional tolerances for tight sealing
Application Scenarios: Electrical and thermal insulation for electrodes, gas lines, and feedthroughs in 200mm PVD/CVD chambers (Endura, Centura platforms).
