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AMAT 0020-22950

Product Name: 13″ Collimator Source Adapter

Product Description: A high-precision machined adapter plate that interfaces between the collimator source and the process chamber, ensuring accurate alignment and a vacuum-tight seal for uniform plasma distribution.

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Detailed content

Technical Specifications:
  • Material: 6061-T6 Aluminum / 316L Stainless Steel
  • Diameter: 13″ (330mm)
  • Flatness: ≤ 0.02mm across the sealing surface
  • Surface Finish: Electropolished, Ra ≤ 0.8μm
  • O-ring Groove: Compatible with Kalrez/ Viton seals
  • Temperature Rating: -20°C to +150°C
  • Vacuum Rating: 10⁻⁹ Torr ultra-high vacuum compatible

    Functional Features:

  • Precision-drilled mounting holes for accurate alignment
  • Low outgassing material for cleanroom compliance
  • High structural rigidity to prevent chamber distortion
  • Corrosion resistance to process gases and plasmas
  • Optimized flow paths for uniform plasma distribution

    Application Scenarios: Used in PVD chambers to mount and align 13″ collimator sources, ensuring uniform thin-film deposition on 200mm/300mm wafers.

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