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AMAT 0090-10396
Product Name: RF Filter Box Assembly
Product Description: A high-performance radio frequency (RF) filtering module designed to suppress electromagnetic interference (EMI) and noise, ensuring clean, stable RF power delivery to plasma process chambers.
Technical Specifications:
- Frequency Range: 400kHz – 60MHz (broadband)
Detailed content
- Insertion Loss: < 0.5dB (pass band)
- Attenuation: > 60dB (stop band)
- Impedance: 50Ω (matched)
- Power Rating: 5kW (continuous)
- Input/Output: N-type RF connectors
- Cooling: Forced-air / Conduction cooled
- Operating Temperature: 0°C to +50°C
Functional Features:
- Multi-stage LC filtering for wideband noise suppression
- High-power handling capability for industrial plasma sources
- Shielded enclosure to prevent RF leakage
- Built-in over-temperature protection
- Low VSWR (Voltage Standing Wave Ratio) for maximum power transfer
Application Scenarios: RF power conditioning for PECVD, PVD, and Etch chambers, filtering out harmonics and noise to stabilize plasma and improve process repeatability.
