Product Description: The Gasonics 90-2590 is typically identified as a Robotic Transfer Arm Assembly or a Wafer Handling End Effector for Gasonics automated wet benches and cluster tools. It is the core mechanism responsible for moving wafers between cassettes, process tanks, and chill/rinse stations with high precision and speed. Technical Specifications:
Product Description: The Gasonics 95-0503 A is a Master Maintenance Kit or a General Hardware Upgrade Kit. The "A" designation typically indicates the primary or "Class A" version of the kit, containing the most critical consumables and spare parts required for major tool overhauls. It is a comprehensive package designed to extend the lifespan of the equipment. Technical Specifications:
Product Description: This part number refers to a specific variation of the Gasonics maintenance kit, focusing on Filtration and Abatement components. The "A" suffix often denotes a revised or upgraded version of the standard filter set. It typically includes Scrubber Cartridges and Exhaust Filters designed to neutralize hazardous byproducts from plasma and wet processes. Technical Specifications:
Product Description: This part number combination identifies a specific Preventive Maintenance (PM) Kit for Gasonics wet bench or strip tools. The "95-0503" serves as the base kit identifier, while "95-3014" specifies a sub-component, likely a set of Vacuum Pump Cartridges or Specific Seal Kits. These kits are essential for maintaining tool performance and uptime. Technical Specifications:
Product Description: The Gasonics AWD-D-3-6-002 is a Dual-Chamber Decoupled Plasma Strip System configured for specific process requirements, likely indicating a 3-slot load lock and a 6-gas line configuration. It is a robust tool designed for production environments requiring high uniformity and repeatability in photoresist removal and surface cleaning. Technical Specifications:
Product Description: This model represents an advanced configuration of the Gasonics AWD-D series, specifically a High-Throughput Decoupled Plasma Strip System. The "3-7" designation often implies a 3-chamber configuration or a specific generation tailored for 300mm (12-inch) wafer compatibility, while "005" denotes a specific hardware revision with enhanced capabilities. It is designed for the most demanding production environments. Technical Specifications:
Product Description: The Gasonics 95-3155 is identified as an RF Impedance Match Network or a Tuner Circuit for plasma generation systems. This component is essential for maximizing power transfer from the RF generator to the plasma load by minimizing reflected power. It ensures stable plasma ignition and maintains process consistency. Technical Specifications:
Product Description: This part number generally refers to a Chamber Liner Kit or a specific Quartz Shield Assembly used in Gasonics plasma or wet bench tools. It acts as a sacrificial barrier protecting the main stainless steel process chamber from corrosive chemical attacks, plasma erosion, and metallic contamination. The kit ensures high purity by preventing metal ions from leaching into the process environment. Technical Specifications:
