Product Description: This part number identifies a specific RF Match Network or Impedance Matching Circuit used in Gasonics plasma systems. The match network is critical for transferring maximum power from the RF generator to the plasma load, ensuring stable ignition and efficient operation. Technical Specifications:
Product Description: The Gasonics AWD-1-7 is an Automated Wet Decoupling (AWD) system, specifically a single-chamber configuration designed for photoresist stripping and wafer cleaning. It utilizes a combination of chemical baths and plasma ashing techniques to remove organic materials from semiconductor wafers. The "1-7" designation often refers to the chamber configuration and wafer size capability. Technical Specifications:
Product Description: This part number typically refers to a specific sub-assembly or component kit within the Gasonics wet bench or plasma strip systems. It is often associated with the gas distribution manifold or a specific replacement kit for the reaction chamber. It is designed to maintain the integrity of high-purity process environments and ensure consistent delivery of process gases. Technical Specifications:
Product Description: This component is a specialized transmission line or antenna element used in microwave plasma sources (often downstream of the main chamber). "AWG" may refer to "Assembly Waveguide." It is designed to transmit microwave energy (typically 2.45 GHz) from a magnetron or solid-state source to generate a high-density plasma remote from the wafer to prevent ion damage. Technical Specifications:
Product Description: This part number identifies a sub-assembly of the gas delivery system, specifically a manifold or "valve box" that houses multiple pneumatic valves, mass flow controllers (MFCs), and filtration units. The "A01" prefix suggests it is a primary gas handling component. The dual number often indicates the main body and a specific internal configuration or orifice set. Technical Specifications:
Product Description: This is a complex assembly specific to the Gasonics 2000 Series Load Lock (LL) chamber. It likely combines a heavy-duty wiring harness for the load lock robot and gates with a pneumatic tubing bundle or a cable carrier (drag chain) assembly. The "AWD-D-2-8-7" suffix indicates a specific configuration for the load lock door mechanism and wafer transfer robot. Technical Specifications:
Product Description: This part number typically refers to a specific feedthrough assembly or a wiring bundle that passes through the vacuum wall (chamber wall) to connect internal sensors (like thermocouples or pressure gauges) to the external control system. The "D-2-3" code often specifies a 3-pin or 3-channel configuration in the "D" series of feedthroughs. Technical Specifications:
Product Description: This is a specialized coaxial or multi-conductor cable used to transmit low-power RF signals or analog sensor data from the chamber or match network back to the control electronics. It is designed to handle sensitive signals without degradation or introducing noise into the measurement. Technical Specifications:
Product Description: This cable assembly serves as the primary communication link between the operator interface station (HMI/PC) and the tool's main processing controller or PLC. It is often a serial communication cable or an Ethernet patch cable specifically cut and shielded for the industrial environment of a semiconductor fab. Technical Specifications:
Product Description: This specific wiring harness connects the machine's central controller to a manifold of pneumatic solenoid valves. It is a critical interface for the tool's gas and vacuum control system. The AWD-1-5 typically routes 24VDC signals to actuate specific valves that control gas injection, chamber isolation, or venting. Technical Specifications:
Product Description: This is a heavy-duty electrical wiring harness designed for distributing AC or DC power within the Gasonics tool. Unlike signal cables, the AWD-1-8 is engineered to carry higher current loads required by actuators, heaters, or vacuum pumps. It is a pre-fabricated assembly that ensures proper grounding and isolation for high-power components. Technical Specifications:
Product Description: This part number identifies a specific internal electrical cable assembly used within Gasonics semiconductor equipment. "AWD" designations typically refer to "Assembly Wiring Documentation" or specific wire harness configurations. The "1-9" suffix denotes a specific routing path, length, and connector pinout. This harness is typically used to route low-voltage control signals or sensor data between the main equipment rack and peripheral subsystems. Technical Specifications:
