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Gasonics RA93-021-04/C RF Impedance Match Network

Product Description: This unit is a critical RF subsystem assembly designed for Gasonics plasma processing equipment. It functions as the impedance match network situated between the RF generator and the plasma chamber. The "RA" prefix typically denotes a specific rack-mount or chassis configuration, while the "C" revision indicates an upgraded circuit board or tuning algorithm. Its primary role is to maximize power transfer efficiency by matching the generator output impedance to the dynamic plasma load impedance. Technical Specifications:

  • Type: Automatic or Manual RF Impedance Match

Gasonics A95-053-02 C Electrode

Product Description: This is a critical wear part, specifically an electrode or a component of the electrostatic chuck (ESC) assembly. The "C" revision typically indicates a material upgrade or a specific geometry change. It is the surface upon which the wafer sits and is often responsible for clamping the wafer electrostatically or mechanically and providing RF bias or cooling. Technical Specifications:

  • Material: Single-crystal Silicon (for RF uniformity) or Aluminum Nitride (for thermal conductivity), coated with dielectric.

Gasonics AWD-D-2-8-4-001 PCB Assembly

Product Description: Similar to the AWD-D-3-4-001 but with a different configuration, this is likely a specific printed circuit board assembly serving as an interface or distribution board. It may route signals from the main CPU to peripheral devices, or act as a breakout board for a specific module like a gas panel or RF sensor. Technical Specifications:

  • Board Type: FR4 or High-Frequency Laminate (Rogers)

Gasonics AWD-D-3-4-001 Assembly

Product Description: This part number identifies a specific wiring harness or cable assembly used within the Gasonics tool. "AWD" often relates to assembly/wiring documentation. The code "D-3-4-001" specifies the exact configuration, length, connector types, and wire gauge for a specific sub-system connection (e.g., between the RF generator and the match network, or between the controller and the chuck). Technical Specifications:

  • Type: Custom Electrical Cable Assembly

Gasonics A95-075-01 Chamber Liner

Product Description: This component is a consumable or semi-consumable shield, typically made of a dielectric or conductive material, that lines the interior walls of the plasma chamber. Its primary purpose is to protect the expensive chamber hardware (usually Aluminum or Stainless Steel) from plasma erosion, chemical corrosion, and deposition of byproducts. Technical Specifications:

  • Material: Quartz (SiO2), Aluminum Oxide (Al2O3), Yttrium Oxide, or Anodized Aluminum
  • Shape: Cylindrical sleeve or dome-shaped cover

Gasonics 17329-01 Gas Distribution Manifold

Product Description: This part is a precision-machined gas manifold or sub-block that houses Mass Flow Controllers (MFCs) and internal channels for delivering process gases to the plasma chamber. It ensures leak-tight gas delivery and accurate mixing ratios. Technical Specifications:

  • Material: 316L Stainless Steel (Electropolished)
  • Gas Channels: Multiple independent channels (typically 2 to 4 gases)

Gasonics PEP-3600 Plasma Etch

Product Description: The PEP-3600 is a high-performance, often single-wafer, plasma processing platform designed for aggressive photoresist stripping, descumming, and surface cleaning. It is engineered for high throughput and uniformity, typically used in advanced semiconductor packaging and logic device manufacturing. It features a downstream or direct plasma source configuration. Technical Specifications:

  • System Type: Single Wafer Plasma Processing Cluster Tool

Gasonics 07100-015 Process Control Module

Product Description: This part number refers to a printed circuit board (PCB) assembly or a sensor module used for monitoring and controlling environmental parameters within the plasma processing system. It acts as the interface between physical sensors and the system's main controller. Technical Specifications:

  • Type: PCB Assembly with Analog/Digital I/O
  • Monitored Parameters: Temperature, Pressure, RF Power (Forward/Reflected), Gas Flow

Gasonics 17317-01D Vacuum System

Product Description: This component is typically a pneumatic throttle valve or a vacuum control module integral to the gas handling system of Gasonics plasma strippers. It regulates the pressure within the process chamber by controlling the pumping speed, which is critical for determining the plasma characteristics (density and ion energy). The "D" suffix denotes a specific revision or material variant. Technical Specifications:

  • Type: Pneumatic Butterfly Valve or Throttle Valve

Gasonics A95-107-01 B Plasma Chamber Component

Product Description: This part number identifies a specific mechanical sub-assembly, likely an electrode or showerhead assembly, utilized in Gasonics plasma processing equipment. It is designed to introduce process gases into the reaction chamber uniformly and serve as the powered or grounded surface for plasma generation. The "B" revision indicates a specific design iteration. Technical Specifications:

  • Material: Aluminum, Anodized Aluminum, or Stainless Steel (316L) with ceramic insulators (Quartz or Alumina).

Gasonics A93-038-01 RF Power Supply

Product Description: This unit is a critical internal component or sub-assembly typically used within Gasonics plasma stripping and cleaning systems. It functions as an RF power supply or a matching network component responsible for generating and controlling the radio frequency energy required to ignite and sustain the plasma discharge during the semiconductor manufacturing process. Technical Specifications:

  • Type: Radio Frequency (RF) Generator or Matching Network Sub-assembly

Gasonics 93-00105A Chamber Component

Introduction: The Gasonics 93-00105A is a specific hardware assembly or component kit. Based on the "93" prefix, this is likely a mechanical part related to the chamber body, lid, or internal fixture. It could be a bracket, a handle, a hinge, or a specific sensor mount. It ensures the mechanical integrity and alignment of internal components. Technical Specifications:

  • Component Type: Mechanical Assembly / Bracket / Mount