Product Description: The Gasonics 90-2590 is typically identified as a Robotic Transfer Arm Assembly or a Wafer Handling End Effector for Gasonics automated wet benches and cluster tools. It is the core mechanism responsible for moving wafers between cassettes, process tanks, and chill/rinse stations with high precision and speed. Technical Specifications:
Product Description: The Gasonics 95-0503 A is a Master Maintenance Kit or a General Hardware Upgrade Kit. The "A" designation typically indicates the primary or "Class A" version of the kit, containing the most critical consumables and spare parts required for major tool overhauls. It is a comprehensive package designed to extend the lifespan of the equipment. Technical Specifications:
Product Description: This part number refers to a specific variation of the Gasonics maintenance kit, focusing on Filtration and Abatement components. The "A" suffix often denotes a revised or upgraded version of the standard filter set. It typically includes Scrubber Cartridges and Exhaust Filters designed to neutralize hazardous byproducts from plasma and wet processes. Technical Specifications:
Product Description: This part number combination identifies a specific Preventive Maintenance (PM) Kit for Gasonics wet bench or strip tools. The "95-0503" serves as the base kit identifier, while "95-3014" specifies a sub-component, likely a set of Vacuum Pump Cartridges or Specific Seal Kits. These kits are essential for maintaining tool performance and uptime. Technical Specifications:
Product Description: The Gasonics AWD-D-3-6-002 is a Dual-Chamber Decoupled Plasma Strip System configured for specific process requirements, likely indicating a 3-slot load lock and a 6-gas line configuration. It is a robust tool designed for production environments requiring high uniformity and repeatability in photoresist removal and surface cleaning. Technical Specifications:
