Introduction: The Gasonics 94-1174 is a sealing kit, typically consisting of elastomeric O-rings, gaskets, or quad-rings. These components are critical for maintaining the vacuum integrity of the process chamber, ensuring that gases do not leak in or out and that the required vacuum level is achieved and sustained. Technical Specifications:
Introduction: The Gasonics 90-1031-01 is an electronic control module, likely a Programmable Logic Controller (PLC) or a dedicated process control interface card. It serves as the "brain" for a specific subsystem within the Gasonics tool, managing sequences, interlocks, and analog I/O. Technical Specifications:
Introduction: The Gasonics 95-2736 is a precision vacuum throttle valve used to regulate the pressure inside a process chamber by controlling the pumping speed. It allows for precise control of gas flow conductance between the chamber and the vacuum pump. Technical Specifications:
Introduction: The Gasonics A95-006-01 is a printed circuit board (PCB) assembly or sub-module that forms the control logic for an RF impedance matching network. It processes feedback signals from the plasma chamber and drives motorized capacitors or variable inductors to achieve a 1:1 Standing Wave Ratio (SWR). Technical Specifications:
Introduction: The Gasonics 0510X-LA24-ABA is an industrial-grade inductive proximity sensor. It is used to detect the presence of metallic objects (such as wafers, robot arms, or chamber lids) without physical contact. It operates on the principle of electromagnetic induction, generating an oscillating field that is dampened when a metal target enters the sensing range. Technical Specifications:
Introduction: The Gasonics A90-005-02 is a solid-state or tube-based RF generator operating at the standard 13.56 MHz frequency. It is the primary source of electromagnetic energy used to create and sustain plasma within the processing chamber. This generator is known for its reliability and precision in power delivery. Technical Specifications:
Introduction: The Gasonics 12-300000-30 is a specialized high voltage power supply module designed to provide the necessary electrical potential for plasma ignition or ion acceleration within Gasonics process tools. It converts standard facility power into high-voltage DC or pulsed output required to sustain specific plasma densities. Technical Specifications:
Introduction: The Gasonics AWD-D-2-8-5-003 is a high-purity pneumatic valve assembly designed for precise control of process gases or vacuum lines within semiconductor manufacturing equipment. It utilizes a diaphragm mechanism to isolate the actuator from the process media, ensuring no contamination and leak-tight operation. Technical Specifications:
Introduction: The Gasonics 16025-02 is a protective consumable component, typically serving as a chamber liner or shield. It is installed inside the plasma processing chamber to protect the main chamber walls and expensive internal components from chemical corrosion, physical sputtering, and particle contamination generated during high-energy plasma processes. Technical Specifications:
Introduction: The Gasonics A97-127-01 is a critical radio frequency (RF) component designed for use in Gasonics plasma stripping and cleaning systems. It functions as an impedance matching network or a part of the RF generation subsystem, ensuring that maximum power is transferred from the RF generator to the plasma chamber. This component is essential for maintaining plasma stability during high-precision photoresist ashing and surface cleaning processes. Technical Specifications:
