Product Description: This part is a precision-machined gas manifold or sub-block that houses Mass Flow Controllers (MFCs) and internal channels for delivering process gases to the plasma chamber. It ensures leak-tight gas delivery and accurate mixing ratios. Technical Specifications:
Product Description: The PEP-3600 is a high-performance, often single-wafer, plasma processing platform designed for aggressive photoresist stripping, descumming, and surface cleaning. It is engineered for high throughput and uniformity, typically used in advanced semiconductor packaging and logic device manufacturing. It features a downstream or direct plasma source configuration. Technical Specifications:
Product Description: This part number refers to a printed circuit board (PCB) assembly or a sensor module used for monitoring and controlling environmental parameters within the plasma processing system. It acts as the interface between physical sensors and the system's main controller. Technical Specifications:
Product Description: This component is typically a pneumatic throttle valve or a vacuum control module integral to the gas handling system of Gasonics plasma strippers. It regulates the pressure within the process chamber by controlling the pumping speed, which is critical for determining the plasma characteristics (density and ion energy). The "D" suffix denotes a specific revision or material variant. Technical Specifications:
Product Description: This part number identifies a specific mechanical sub-assembly, likely an electrode or showerhead assembly, utilized in Gasonics plasma processing equipment. It is designed to introduce process gases into the reaction chamber uniformly and serve as the powered or grounded surface for plasma generation. The "B" revision indicates a specific design iteration. Technical Specifications:
Product Description: This unit is a critical internal component or sub-assembly typically used within Gasonics plasma stripping and cleaning systems. It functions as an RF power supply or a matching network component responsible for generating and controlling the radio frequency energy required to ignite and sustain the plasma discharge during the semiconductor manufacturing process. Technical Specifications:
Introduction: The Gasonics 93-00105A is a specific hardware assembly or component kit. Based on the "93" prefix, this is likely a mechanical part related to the chamber body, lid, or internal fixture. It could be a bracket, a handle, a hinge, or a specific sensor mount. It ensures the mechanical integrity and alignment of internal components. Technical Specifications:
Introduction: The Gasonics AE 2001 is a high-performance RF (Radio Frequency) power generator. The "AE" prefix often indicates an "Advanced Energy" compatible or Gasonics-branded solid-state generator. It is designed to deliver precise RF power for plasma generation in semiconductor manufacturing processes like etching, deposition, and ashing. Technical Specifications:
Introduction: The Gasonics AWO-1-2 is a specific optical viewport configuration. It is a critical component for maintaining vacuum integrity while allowing light to pass through the chamber wall. This model is often used in older or specific generations of Gasonics equipment. Technical Specifications:
Introduction: The Gasonics AWO-1-3 is an optical viewport assembly with a specific dimension (likely 1.3 inches or a corresponding flange code). It bridges the gap between the smallest and medium-sized viewports, offering a balance of optical access and mechanical robustness. Technical Specifications:
Introduction: The Gasonics AWO-1-1 is the base or smallest configuration in the AWO viewport series. It provides a fundamental optical access port for vacuum chambers. This component is essential for basic visual inspection and simple optical sensor integration. Technical Specifications:
Introduction: The Gasonics AWO-1-4 is a compact optical viewport assembly. It is designed to fit into space-constrained environments while providing essential optical access for monitoring and diagnostics. The "1-4" typically denotes a smaller aperture size compared to other AWO models. Technical Specifications:
