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Gasonics 08063-001

Product Description: This part number typically refers to a specific sub-assembly or component kit within the Gasonics wet bench or plasma strip systems. It is often associated with the gas distribution manifold or a specific replacement kit for the reaction chamber. It is designed to maintain the integrity of high-purity process environments and ensure consistent delivery of process gases. Technical Specifications:

  • Component Type: Gas Distribution Manifold / Chamber Liner Kit

Gasonics AWG-1-5-001 Microwave Waveguide

Product Description: This component is a specialized transmission line or antenna element used in microwave plasma sources (often downstream of the main chamber). "AWG" may refer to "Assembly Waveguide." It is designed to transmit microwave energy (typically 2.45 GHz) from a magnetron or solid-state source to generate a high-density plasma remote from the wafer to prevent ion damage. Technical Specifications:

  • Type: Rectangular Waveguide or Slot Antenna
  • Material: Aluminum, Brass, or Copper (silver-plated for conductivity)

Gasonics A01-132-01/01-2125 Gas Panel

Product Description: This part number identifies a sub-assembly of the gas delivery system, specifically a manifold or "valve box" that houses multiple pneumatic valves, mass flow controllers (MFCs), and filtration units. The "A01" prefix suggests it is a primary gas handling component. The dual number often indicates the main body and a specific internal configuration or orifice set. Technical Specifications:

  • Type: Gas Distribution Manifold / Valve Box
  • Material: 316L Electropolished Stainless Steel or Aluminum

Gasonics 2000-LL AWD-D-2-8-7 Load Lock Wiring Harness

Product Description: This is a complex assembly specific to the Gasonics 2000 Series Load Lock (LL) chamber. It likely combines a heavy-duty wiring harness for the load lock robot and gates with a pneumatic tubing bundle or a cable carrier (drag chain) assembly. The "AWD-D-2-8-7" suffix indicates a specific configuration for the load lock door mechanism and wafer transfer robot. Technical Specifications:

  • Type: Integrated Cable/Hose Carrier Assembly
  • Components: Bundled power cables, signal wires, and pneumatic tubes

Gasonics AWD-D-2-3 Vacuum Chamber Feedthrough Flange

Product Description: This part number typically refers to a specific feedthrough assembly or a wiring bundle that passes through the vacuum wall (chamber wall) to connect internal sensors (like thermocouples or pressure gauges) to the external control system. The "D-2-3" code often specifies a 3-pin or 3-channel configuration in the "D" series of feedthroughs. Technical Specifications:

  • Type: Vacuum Feedthrough / Hermetic Seal
  • Material: Stainless Steel 316L body, Ceramic or Glass insulators

Gasonics AWD-1-6 RF Sensor

Product Description: This is a specialized coaxial or multi-conductor cable used to transmit low-power RF signals or analog sensor data from the chamber or match network back to the control electronics. It is designed to handle sensitive signals without degradation or introducing noise into the measurement. Technical Specifications:

  • Type: Shielded Coaxial or Triaxial Cable
  • Impedance: 50 Ohms (RF) or High Impedance (Sensors)

Gasonics AWD-1-1 Main Controller

Product Description: This cable assembly serves as the primary communication link between the operator interface station (HMI/PC) and the tool's main processing controller or PLC. It is often a serial communication cable or an Ethernet patch cable specifically cut and shielded for the industrial environment of a semiconductor fab. Technical Specifications:

  • Type: Data Communication Cable / Serial Cable

Gasonics AWD-1-5 Pneumatic Solenoid Valve Manifold Harness

Product Description: This specific wiring harness connects the machine's central controller to a manifold of pneumatic solenoid valves. It is a critical interface for the tool's gas and vacuum control system. The AWD-1-5 typically routes 24VDC signals to actuate specific valves that control gas injection, chamber isolation, or venting. Technical Specifications:

  • Type: Multi-pair Signal Cable for Pneumatics

Gasonics AWD-1-8 Power Distribution Cable Assembly

Product Description: This is a heavy-duty electrical wiring harness designed for distributing AC or DC power within the Gasonics tool. Unlike signal cables, the AWD-1-8 is engineered to carry higher current loads required by actuators, heaters, or vacuum pumps. It is a pre-fabricated assembly that ensures proper grounding and isolation for high-power components. Technical Specifications:

  • Type: Power Cable / Mains Lead

Gasonics AWD-1-9 Internal Wiring Harness

Product Description: This part number identifies a specific internal electrical cable assembly used within Gasonics semiconductor equipment. "AWD" designations typically refer to "Assembly Wiring Documentation" or specific wire harness configurations. The "1-9" suffix denotes a specific routing path, length, and connector pinout. This harness is typically used to route low-voltage control signals or sensor data between the main equipment rack and peripheral subsystems. Technical Specifications:

  • Type: Multi-conductor Shielded Cable Assembly

Gasonics RA93-021-04/C RF Impedance Match Network

Product Description: This unit is a critical RF subsystem assembly designed for Gasonics plasma processing equipment. It functions as the impedance match network situated between the RF generator and the plasma chamber. The "RA" prefix typically denotes a specific rack-mount or chassis configuration, while the "C" revision indicates an upgraded circuit board or tuning algorithm. Its primary role is to maximize power transfer efficiency by matching the generator output impedance to the dynamic plasma load impedance. Technical Specifications:

  • Type: Automatic or Manual RF Impedance Match

Gasonics A95-053-02 C Electrode

Product Description: This is a critical wear part, specifically an electrode or a component of the electrostatic chuck (ESC) assembly. The "C" revision typically indicates a material upgrade or a specific geometry change. It is the surface upon which the wafer sits and is often responsible for clamping the wafer electrostatically or mechanically and providing RF bias or cooling. Technical Specifications:

  • Material: Single-crystal Silicon (for RF uniformity) or Aluminum Nitride (for thermal conductivity), coated with dielectric.