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Gasonics 93-00105A Chamber Component
Introduction:
The Gasonics 93-00105A is a specific hardware assembly or component kit. Based on the “93” prefix, this is likely a mechanical part related to the chamber body, lid, or internal fixture. It could be a bracket, a handle, a hinge, or a specific sensor mount. It ensures the mechanical integrity and alignment of internal components.
Technical Specifications:
- Component Type: Mechanical Assembly / Bracket / Mount
Detailed content
- Material: Stainless Steel 304/316L or Aluminum 6061-T6
- Finish: Anodized (Aluminum) or Passivated (Stainless)
- Dimensions: Specific to chamber model
- Load Rating: Designed to support internal components (electrodes, shields)
- Vacuum Compatibility: Low outgassing, UHV compatible
Functional Features:
- Structural Support: Provides mounting points for heavy internal components.
- Precision Alignment: Ensures electrodes or gas injectors are positioned correctly relative to the wafer.
- Thermal Stability: Material chosen to minimize thermal expansion mismatch.
- Ease of Assembly: Designed for cleanroom assembly with standard tools.
Application Scenarios:
- Chamber Assembly: Used during the manufacturing or rebuilding of process chambers.
- Component Mounting: Mounting RF electrodes, gas showerheads, or viewports.
- Maintenance: Replacement of worn or damaged mechanical parts.
- Retrofitting: Adapting older chambers for new process recipes or hardware.
