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Gasonics 17317-01D Vacuum System
Product Description: This component is typically a pneumatic throttle valve or a vacuum control module integral to the gas handling system of Gasonics plasma strippers. It regulates the pressure within the process chamber by controlling the pumping speed, which is critical for determining the plasma characteristics (density and ion energy). The “D” suffix denotes a specific revision or material variant.
Technical Specifications:
- Type: Pneumatic Butterfly Valve or Throttle Valve
Detailed content
- Pressure Range: Atmosphere to High Vacuum (1000 mTorr to < 10 mTorr)
- Materials: Stainless Steel body, Viton or Buna-N seals
- Actuation: Pneumatic (single or double acting)
- Control Signal: 0-5VDC or 4-20mA analog signal, or digital pneumatic control
- Port Size: ISO-K or CF flange configurations (e.g., 4-inch, 8-inch)
Functional Features:
- Precise Pressure Control: Allows fine-tuning of chamber pressure to optimize process recipes.
- Fast Response: Rapid opening/closing for quick chamber pump-down or venting.
- Vacuum Isolation: Provides a tight seal to maintain base pressure when the system is idle.
- Process Repeatability: Ensures consistent pressure profiles for every wafer run.
Application Scenarios:
- Process Stabilization: Maintaining constant pressure during plasma ashing to prevent microloading effects.
- Pump-down Control: Regulating the speed of evacuation to prevent thermal shock to wafers.
- Gas Flow Management: Working in conjunction with mass flow controllers (MFCs) to set the correct gas residence time.
- Safety Venting: Rapid isolation and venting of the chamber in case of emergency or power failure.
