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Gasonics A95-075-01 Chamber Liner
Product Description: This component is a consumable or semi-consumable shield, typically made of a dielectric or conductive material, that lines the interior walls of the plasma chamber. Its primary purpose is to protect the expensive chamber hardware (usually Aluminum or Stainless Steel) from plasma erosion, chemical corrosion, and deposition of byproducts.
Technical Specifications:
- Material: Quartz (SiO2), Aluminum Oxide (Al2O3), Yttrium Oxide, or Anodized Aluminum
- Shape: Cylindrical sleeve or dome-shaped cover
Detailed content
- Thickness: Optimized for lifetime vs. thermal transfer (typically 3mm – 10mm)
- Temperature Resistance: Up to 600°C (Quartz) or higher for ceramics
- Coating: May have thermal spray coatings for erosion resistance
Functional Features:
- Erosion Protection: Sacrificial layer that absorbs ion bombardment and chemical attack.
- Particle Control: Smooth surfaces prevent flaking of deposited films which could fall onto the wafer.
- Electrical Isolation: If made of dielectric (Quartz/Ceramic), it prevents arcing to the chamber wall.
- Thermal Management: Helps distribute heat evenly within the chamber volume.
Application Scenarios:
- High-Power Plasma: Used in chambers running high-density plasmas where physical sputtering is significant.
- Corrosive Chemistries: Essential when using fluorine-based gases (CF4, SF6) that attack metal chambers.
- Metal Deposition: Prevents metal buildup on chamber walls during sputtering or CVD processes.
- Routine Maintenance: Replaced periodically during preventive maintenance (PM) cycles to ensure tool performance.
