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Gasonics 08063-001
Product Description: This part number typically refers to a specific sub-assembly or component kit within the Gasonics wet bench or plasma strip systems. It is often associated with the gas distribution manifold or a specific replacement kit for the reaction chamber. It is designed to maintain the integrity of high-purity process environments and ensure consistent delivery of process gases.
Technical Specifications:
- Component Type: Gas Distribution Manifold / Chamber Liner Kit
Detailed content
- Material: High-purity Quartz or Aluminum (Anodized)
- Compatibility: Designed for specific Gasonics 8000 or 10000 series wet bench tools
- Sealing Mechanism: Fluoropolymer O-rings (Viton or Kalrez) for chemical resistance
- Gas Ports: Multiple inlet ports for CF4, O2, N2, or Argon
Functional Features:
- Corrosion Resistance: Engineered to withstand aggressive acid and base chemistries used in photoresist stripping and cleaning.
- Uniform Flow: Optimized internal geometry ensures laminar flow of gases or chemicals across the substrate surface.
- Easy Maintenance: Designed as a quick-change module to minimize tool downtime during preventive maintenance.
- Particle Control: Smooth internal surfaces minimize particle generation and trapping.1.
Application Scenarios:
- Semiconductor Manufacturing: Used in the post-etch residue removal process.
- MEMS Fabrication: Cleaning of micro-electromechanical structures where particle contamination is critical.
- Compound Semiconductors: Processing of GaAs or InP wafers requiring high-purity environments.
- Tool Refurbishment: Used as a replacement part to upgrade older Gasonics wet benches to newer specifications.
