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Gasonics A01-132-01/01-2125 Gas Panel
Product Description: This part number identifies a sub-assembly of the gas delivery system, specifically a manifold or “valve box” that houses multiple pneumatic valves, mass flow controllers (MFCs), and filtration units. The “A01” prefix suggests it is a primary gas handling component. The dual number often indicates the main body and a specific internal configuration or orifice set.
Technical Specifications:
- Type: Gas Distribution Manifold / Valve Box
- Material: 316L Electropolished Stainless Steel or Aluminum
Detailed content
- Gas Paths: 2 to 4 independent gas lines
- Components: Integrates MFCs, Pneumatic Valves, Filters, and Pressure Transducers
- Sealing: VCR or Metal Gasket Face Seal
- Leak Rate: < 1 x 10^-9 scc/s Helium
- Finish: Ra < 15 micro-inches internal surface finish
Functional Features:
- Precise Gas Delivery: Ensures accurate mixing ratios of process gases (e.g., O2, CF4, Ar) before entering the chamber.
- Contamination Control: All-metal seals and electropolished surfaces minimize adsorption and particle generation.
- Modular Design: Allows for quick swapping of MFCs or valves for different process recipes.
- Safety: Includes burst discs and vent lines for over-pressure protection.
Application Scenarios:
- Etching Processes: Delivering precise flows of etchant gases like CF4, CHF3, or Cl2.
- Ashing/Stripping: Controlling the flow of oxygen and hydrogen for photoresist removal.
- CVD Precursors: Handling specialized gases for chemical vapor deposition (if equipped with appropriate MFCs).
- Abatement: Routing toxic effluent gases to the scrubber system safely.
