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Gasonics AWG-1-5-001 Microwave Waveguide
Product Description: This component is a specialized transmission line or antenna element used in microwave plasma sources (often downstream of the main chamber). “AWG” may refer to “Assembly Waveguide.” It is designed to transmit microwave energy (typically 2.45 GHz) from a magnetron or solid-state source to generate a high-density plasma remote from the wafer to prevent ion damage.
Technical Specifications:
- Type: Rectangular Waveguide or Slot Antenna
- Material: Aluminum, Brass, or Copper (silver-plated for conductivity)
Detailed content
- Frequency: 2.45 GHz (ISM Band)
- Dimensions: Standard WR-340 or WR-284 waveguide dimensions
- Cooling: Water-cooled channels for high-power operation
- Impedance: 50 Ohms matched
- Mounting: Flange with choke joints for RF containment
Functional Features:
- High Efficiency: Low-loss transmission of microwave power to maximize plasma density.
- Directional Control: Shapes the microwave field to optimize plasma uniformity.
- Isolation: Physical separation of the microwave source from the vacuum environment.
- Tunable: May include a tuning stub (iris) to adjust the impedance match.
Application Scenarios:
- Downstream Plasma Cleaning: Generating a high-density, low-ion-energy plasma for gentle surface cleaning.
- Photoresist Ashing: Efficiently breaking down organic polymers without damaging underlying metal layers.
- Plasma Enhanced CVD: Assisting in the dissociation of precursor gases for deposition.
- Large Area Processing: Used in linear or circular arrays for processing large substrates or multiple wafers.
