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Gasonics 2000-LL AWD-D-2-8-7 Load Lock Wiring Harness
Product Description: This is a complex assembly specific to the Gasonics 2000 Series Load Lock (LL) chamber. It likely combines a heavy-duty wiring harness for the load lock robot and gates with a pneumatic tubing bundle or a cable carrier (drag chain) assembly. The “AWD-D-2-8-7” suffix indicates a specific configuration for the load lock door mechanism and wafer transfer robot.
Technical Specifications:
- Type: Integrated Cable/Hose Carrier Assembly
- Components: Bundled power cables, signal wires, and pneumatic tubes
Detailed content
- Material: Aluminum or Stainless Steel carrier track, Polyurethane cables
- Movement: Designed for continuous linear or rotational motion (cable carrier)
- Connectors: Quick-disconnect pneumatic fittings and military-spec electrical plugs
- Length: Matched to the stroke length of the load lock robot
Functional Features:
- Cable Management: Prevents wire tangling and snagging during the high-speed movement of the load lock arm.
- Protection: Shielding and outer tubing protect delicate wires from mechanical abrasion.
- Integrated Pneumatics/Electrics: Combines air lines for actuation and wires for sensing in a single streamlined bundle.
- Vibration Damping: Reduces mechanical stress on connectors caused by robot acceleration.
Application Scenarios:
- Wafer Transfer: Powers and controls the robot arm that moves wafers between the cassette and the process chamber.
- Gate Valve Operation: Controls the pneumatic actuators for the load lock isolation gate and slot valve.
- Pre-alignment: Houses cables for the wafer pre-alignment sensor (optical or mechanical).
- Load Lock Pumping: Includes wiring for the load lock’s dedicated vacuum gauge and throttle valve.
