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Gasonics AWD-D-2-3 Vacuum Chamber Feedthrough Flange
Product Description: This part number typically refers to a specific feedthrough assembly or a wiring bundle that passes through the vacuum wall (chamber wall) to connect internal sensors (like thermocouples or pressure gauges) to the external control system. The “D-2-3” code often specifies a 3-pin or 3-channel configuration in the “D” series of feedthroughs.
Technical Specifications:
- Type: Vacuum Feedthrough / Hermetic Seal
- Material: Stainless Steel 316L body, Ceramic or Glass insulators
Detailed content
- Conductors: 3 to 6 isolated copper or platinum wires (for RTDs)
- Vacuum Rating: 10^-9 Torr compatible
- Flange Type: ISO-K or CF (ConFlat)
- Temperature Range: Cryogenic to 450°C (depending on insulator)
- Current Rating: 1A to 5A per pin
Functional Features:
- Vacuum Integrity: Maintains ultra-high vacuum (UHV) conditions while allowing electrical signals to pass.
- Thermal Isolation: Minimizes heat transfer between the hot chamber and external electronics.
- Hermetic Seal: Prevents outgassing or air ingress into the process chamber.
- Modularity: Allows for easy replacement of internal sensors without breaking the main vacuum seal.
Application Scenarios:
- Internal Temperature Monitoring: Connecting embedded thermocouples in the showerhead or electrode to external PID controllers.
- Plasma Ignition: High-voltage feedthroughs for plasma ignition pins or strikers.
- Pressure Sensing: Connecting capacitance manometers or Pirani gauges inside the chamber volume.
- Electrostatic Chuck (ESC) Connection: Providing the high-voltage DC line for wafer clamping.
