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Gasonics AWD-1-6 RF Sensor
Product Description: This is a specialized coaxial or multi-conductor cable used to transmit low-power RF signals or analog sensor data from the chamber or match network back to the control electronics. It is designed to handle sensitive signals without degradation or introducing noise into the measurement.
Technical Specifications:
- Type: Shielded Coaxial or Triaxial Cable
- Impedance: 50 Ohms (RF) or High Impedance (Sensors)
Detailed content
- Dielectric: Teflon (PTFE) for low loss and high frequency
- Shielding: Double or triple shield to prevent signal leakage
- Connectors: BNC, TNC, SMA, or custom high-density connectors
- Capacitance: Low capacitance per foot to preserve signal rise time
Functional Features:
- Signal Fidelity: Minimizes attenuation and distortion of forward/reflected power signals.
- Interference Rejection: Superior shielding prevents plasma noise from corrupting sensor readings.
- Flexibility: Semi-rigid or flexible designs to route around chamber components.
- High Voltage Isolation: Some variants are rated for high voltage isolation for bias probes.
Application Scenarios:
- Power Monitoring: Connecting directional couplers in the match network to the system controller.
- Endpoint Detection: Transmitting optical emission spectroscopy (OES) signals from the chamber window to the spectrometer.
- Bias Voltage Sensing: Monitoring the DC bias or RF voltage on the electrode.
- Impedance Feedback: Providing real-time load impedance data to the auto-tune algorithm.
