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Lam Research 810-068158-015
Product Name
Robot Interface Board / Node Robot Interface PCB Assembly.
Product Introduction
This board interfaces wafer-handling robots with the tool main controller. It transmits motion commands, receives position feedback, manages handshake signals, and supports interlock communication for load-lock and chamber wafer transfer.
Detailed content
Technical Specifications
Manufacturer: Lam Research.
Part Number: 810-068158-015.
Module Type: Robot interface PCB.
Interfaces: D-sub robot motor and feedback connectors, system bus connector, status I/O terminals.
Display: Selected listings for related 068158 assemblies describe integrated LCD status display.
Operating Temperature: 0°C to 50°C for listed robot-interface version.
Storage Temperature: -40°C to 85°C.
Humidity: 5%–95% non-condensing.
Protection Class: IP20 rack-mounted PCB version.
Weight: Approximately 0.74 kg for listed robot-interface version.
Diagnostics: Status LEDs and handshake test points.
Functional Features
Robot motion command transfer, encoder or position feedback processing, wafer-transfer sequencing, interlock handling, communication-status indication, and fault localization through LED diagnostics.
Structure Characteristics
PCB with motor and feedback connectors, controller bus interface, status indicators, and rigid mounting format for semiconductor tool robot cabinet. Related 068158 family listings use metal chassis mounting and D-sub ports.
Working Principle
The main controller issues transfer commands. The interface board converts commands into robot drive and feedback signals, monitors position and safety interlocks, and returns status to the host for sequential wafer handling.
Application Scenarios
Lam Research 300 mm wafer transfer robots, load-lock transfer systems, etch tool wafer handling subsystems, and automated material-handling racks in semiconductor fabs.
Installation Requirements
Stop wafer transfer operations. Place robot in service mode. Use ESD protection. Photograph all D-sub and bus connectors. Install with correct revision and robot software configuration. Perform teach-and-verify transfer sequence after replacement.
Usage Precautions
Do not power the board during installation. Do not interchange 068158 revisions without checking connector assignment. Verify robot zero position and interlock status before returning tool to production.
Source Note
Related 068158 family data include LCD and metal-chassis variants; confirm whether 810-068158-015 uses those components by checking the installed board label and Lam robot documentation.
