Lam Research 810-091934-00

Digital guide

Product Name

Public spare-part sources list this number as RF bias power supply or RF matching network. Confirm the physical unit before use.

Option A – RF Bias Power Supply

Frequency: 13.56 MHz.

Power Rating: 0–4000 W.

Impedance: 50 ohm with auto-match.

Output Voltage: 0–2000 Vpp.

Output Current: 0–10 A.

Matching Range: 5–2000 ohm automatic according to listing.

Pulse Function: Optional pulse bias, 100 Hz–100 kHz, duty 10%–90% according to listing.

Efficiency: Greater than 85% according to listing.

Cooling: Water cooling, 18°C inlet, 3 L/min according to listing.

Amplifier Technology: LDMOS.

Matching Network: PI-network with vacuum variable capacitors.

Enclosure: 304 stainless steel, 19-inch rack, 3U according to listing.

RF Connector: 7/16 DIN, 50 ohm.

Communication: RS-232 and Ethernet according to listing.