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Lam Research 810-048219-015
Product Name
RF Sync Out PCBA / Pulse Sample and Hold Board with Synchronization Output.
Product Introduction
This board captures high-speed analog samples, holds transient signal values, and provides synchronized output timing for RF measurement and plasma control subsystems. It supports diagnostic and control functions in etch or deposition tools requiring precise RF pulse monitoring.
Detailed content
Technical Specifications
Module Type: Pulse sample-and-hold PCBA with sync output.
Application: Plasma etch and deposition RF diagnostics.
Sampling Function: High-speed analog sampling gates, precision hold capacitors, sync-out logic.
Interface: Proprietary chassis backplane.
Supply: Low-voltage multi-rail DC chassis supply.
Operating Temperature: 10°C to 40°C.
Cooling: Chassis slot convection.
Form Factor: Dedicated OEM plug-in circuit card.
Functional Features
Analog voltage sampling, transient signal holding, synchronized clock output, RF pulse timing verification, low-noise multilayer layout, and backplane communication with host measurement system.
Structure Characteristics
Multilayer PCB with analog input stages, sample-and-hold components, synchronization drivers, backplane connector, and shielded circuit areas for noise isolation.
Working Principle
Incoming RF or analog process signals are sampled by high-speed switches. The hold circuit retains voltage value for measurement, while sync-out logic transmits timing references to associated controllers or diagnostic modules.
Application Scenarios
Lam Research plasma etch chambers, RF diagnostics racks, pulse plasma systems, deposition tools requiring synchronized transient measurement, and advanced process control data acquisition.
Installation Requirements
Power down the card cage. Verify backplane slot and board revision. Use ESD handling. Seat the card aligned with guide rails. Confirm POST and synchronization output using calibrated oscilloscope or tool diagnostics.
Usage Precautions
Do not hot-swap. Do not install mismatched revisions. Protect from power surges, chemical fumes, and moisture. Validate sample accuracy and sync timing after installation.
Source Note
Specifications are based on publicly listed semiconductor spare-part sources; obtain Lam Research board drawing and calibration procedure for production use.
