Yokogawa SEC401‑11‑BCOUPLES401
- Product Name: SEC401 Series Mass Flow Controller SEC401‑11‑BCOUPLES401
- Product Series: SEC401 Thermal Mass Flow Controllers
- Technical Specifications: Flow measurement range: customized gas flow range; control precision: ±0.5% FS; response time ≤1 s; communication protocol: RS485/Modbus; supply voltage: 24 VDC; gas compatibility: inert gas, standard industrial gas
Detailed content
- Functional Features: Real‑time gas mass flow measurement and closed‑loop control; gas type adaptive correction; zero‑point automatic calibration function; over‑flow and pressure protection alarm
- Performance Parameters: Repeatability ≤0.2% FS; long‑term drift ≤0.3% FS per year; operating pressure range: 0–1 MPa
- Material Composition: Flow sensor: stainless steel 316L; valve body: corrosion‑resistant alloy; sealing parts: PTFE fluoroplastic
- Structural Characteristics: Integrated measurement‑control‑valve body structure; compact pipeline‑mount design; internal thermal diffusion sensing module
- Working Principle: Thermal mass flow measurement principle; calculates gas mass flow by detecting temperature difference caused by gas flow on heating elements, realizes closed‑loop flow control via proportional valve
- Advantages & Highlights: High control precision; fast response speed; corrosion resistance; stable gas flow regulation performance
- Applicable Industries: Semiconductor manufacturing, laboratory gas distribution, chemical synthesis, new‑energy material production, precision gas control systems
- Installation Requirements: Horizontal pipeline installation; ensure gas inlet/outlet direction is correct; install upstream filter to prevent particle impurities
- Usage Precautions: Strictly use specified gas types; avoid over‑pressure impact; regular zero‑point calibration maintenance












