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Gasonics AWO-1-5 Optical Window
Introduction:
The Gasonics AWO-1-5 is an optical component, typically a viewport or window assembly, designed for installation on vacuum chamber walls or doors. It allows visual inspection of the plasma process or provides an optical path for diagnostic sensors (such as pyrometers or end-point detectors). The “AWO” series indicates an Optical/Window assembly, and “1-5” likely refers to a specific size or flange dimension.
Technical Specifications:
- Component Type: Vacuum Viewport / Optical Window
Detailed content
- Window Material: Fused Quartz (Synthetic Silica) or Borosilicate Glass
- Diameter: 1.5 inches (Likely interpretation of “1-5”) or specific metric equivalent
- Flange Type: ISO-K, ISO-F, or Conflat (CF) flange
- Viewing Area: Clear aperture dependent on flange size (e.g., 1 inch diameter clear view)
- Transmission Range: 200nm to 2500nm (UV to IR for Quartz)
- Vacuum Rating: 1 x 10^-9 Torr (Bakeable to 150°C)
- Pressure Differential: Full atmospheric pressure (14.7 psi)
Functional Features:
- Optical Clarity: High transmission with minimal distortion for accurate visual monitoring.
- Plasma Resistance: Quartz material resists darkening or devitrification caused by UV radiation from the plasma.
- Anti-Reflective Coating: Optional coating to reduce glare and improve light transmission for sensors.
- Thermal Shock Resistance: Can withstand rapid temperature changes during process heating or cooling.
- Easy Replacement: Designed to be replaced without breaking the main chamber vacuum (via gate valve isolation).
Application Scenarios:
- Plasma Monitoring: Allowing operators to visually inspect plasma color and uniformity (e.g., pink for Argon, blue for Oxygen).
- Optical Endpoint Detection: Providing a window for optical emission spectroscopy (OES) sensors to detect when an etch layer is cleared.
- Pyrometry: Allowing infrared sensors to view the wafer backside for temperature measurement.
- Laser Alignment: Providing a path for alignment lasers used in lithography or inspection tools.
- Chamber Inspection: Visual inspection of chamber components for arcing damage or particle accumulation.
