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Gasonics AWD-D-3-8-006 Pneumatic Diaphragm Valve
Introduction:
Similar to the 008 variant, the AWD-D-3-8-006 is a 3/8-inch pneumatic diaphragm valve. The difference in the suffix code (006 vs 008) typically indicates a variation in the diaphragm material, seal type, or internal flow path geometry optimized for a specific gas or flow characteristic. It maintains the high-purity standards required for semiconductor processing.
Technical Specifications:
- Port Size: 3/8 inch Face Seal (VCR/Swagelok compatible)
- Body Material: 316L Stainless Steel
Detailed content
- Diaphragm Material: Kalrez (Perfluoroelastomer) or Chemraz (for enhanced chemical resistance and lower particle generation)
- Actuation: Pneumatic (60-100 PSI)
- Pressure Rating: 150 PSIG @ 70°F
- Vacuum Rating: 1 x 10^-9 Torr (Leak tight)
- Temperature Range: -20°C to +200°C (Depends on diaphragm material)
Functional Features:
- Enhanced Chemical Resistance: Use of Kalrez/Chemraz allows handling of highly aggressive fluorine-based chemistries (e.g., C4F8, C5F8) without swelling or degradation.
- Low Particle Generation: Smoother diaphragm actuation reduces the risk of generating particles that could fall onto wafers.
- High Cycle Life: Optimized for frequent actuation in automated process sequences.
- Fail-Safe Operation: Configurable as Normally Open or Normally Closed to meet specific safety requirements.
- Easy Disassembly: Designed for tool-less or minimal-tool disassembly for cleaning and maintenance in a cleanroom.
Application Scenarios:
- Fluorine Chemistry Handling: Specifically used in etch tools utilizing high concentrations of fluorocarbon gases.
- High Purity Gas Distribution: Critical points in the gas delivery system where contamination must be minimized.
- Vacuum Isolation Valves: Isolating sensitive vacuum components like ion pumps or cryopumps.
- In-Situ Cleaning (ISC): Handling cleaning agents or plasma-excited species during chamber cleaning cycles.
- Research & Development Tools: Used in experimental setups requiring precise gas handling and high purity.
