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Gasonics AWD-D-2-8-5-003 Pneumatic Diaphragm Valve
Introduction:
The Gasonics AWD-D-2-8-5-003 is a high-purity pneumatic valve assembly designed for precise control of process gases or vacuum lines within semiconductor manufacturing equipment. It utilizes a diaphragm mechanism to isolate the actuator from the process media, ensuring no contamination and leak-tight operation.
Technical Specifications:
- Valve Type: 2-way or 3-way Pneumatic Diaphragm Valve
- Port Size: Typically 1/4 inch VCR or Swagelok fitting
Detailed content
- Body Material: Stainless Steel 316L Electropolished (EP)
- Diaphragm Material: PTFE, PFA, or Kalrez (for aggressive chemistries)
- Actuation Pressure: 60 to 100 PSI (Pneumatic)
- Leak Rate: < 1 x 10^-9 std cc/sec Helium (Ultra-high vacuum compatible)
- Cycle Life: > 1,000,000 cycles
Functional Features:
- Zero Dead Leg: Streamlined flow path design prevents gas trapping and ensures complete purging.
- Fast Actuation: Rapid opening and closing times (typically < 1 second) for precise process timing.
- Chemical Inertness: Wetted materials are chosen to resist corrosion from process gases like ammonia, chlorine, or WF6.
- Fail-Safe Operation: Can be configured as Normally Open (NO) or Normally Closed (NC) for safety interlocks.
Application Scenarios:
- Gas Panel Control: Regulating the flow of precursor gases in CVD or ALD systems.
- Vacuum Isolation: Isolating the pump from the process chamber during maintenance or venting.
- Purge Lines: Controlling inert gas (Nitrogen/Argon) purge flows to prevent oxidation.
- Abatement Systems: Switching gas flows between the process tool and the abatement scrubber.
