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Gasonics A90-005-02 RF Generator (13.56 MHz)
Introduction:
The Gasonics A90-005-02 is a solid-state or tube-based RF generator operating at the standard 13.56 MHz frequency. It is the primary source of electromagnetic energy used to create and sustain plasma within the processing chamber. This generator is known for its reliability and precision in power delivery.
Technical Specifications:
- Type: RF Power Generator (Solid State or Tetrode)
- Frequency: 13.56 MHz ± 0.005%
Detailed content
- Power Output: 500 Watts to 1500 Watts (Configurable)
- Harmonics: < -60 dBc (Low harmonic distortion)
- Modulation: Capable of CW, Pulse, and complex waveform modulation
- Efficiency: > 70%
- Cooling: Forced air cooling with filtered intake
Functional Features:
- Frequency Lock: Phase-locked loop (PLL) ensures the generator stays precisely on frequency, preventing drift that could affect plasma impedance.
- Forward/Reflected Power Monitoring: Built-in directional couplers measure power delivered to the load vs. power reflected back.
- Auto-Tune Compatibility: Works in conjunction with matching networks to optimize power transfer.
- Digital Interface: RS-232 or Ethernet interface for remote control and diagnostics.
Application Scenarios:
- Dielectric Etch: Providing energy for etching silicon dioxide or silicon nitride.
- Photoresist Descum: Low-power operation to remove residual resist without damaging the underlying layer.
- Plasma Treatment: Surface modification of polymers or metals.
- Sputter Deposition: Generating plasma to ionize sputtering gas (Argon).
