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Gasonics 95-2736 Vacuum Throttle Valve
Introduction:
The Gasonics 95-2736 is a precision vacuum throttle valve used to regulate the pressure inside a process chamber by controlling the pumping speed. It allows for precise control of gas flow conductance between the chamber and the vacuum pump.
Technical Specifications:
- Valve Type: Pneumatically actuated butterfly or poppet valve
- Port Size: ISO-K or ISO-F flange (e.g., 6-inch, 8-inch)
Detailed content
- Control Range: 1 mTorr to 760 Torr (Atmosphere)
- Actuation: Pneumatic piston (Spring return or double acting)
- Position Feedback: LVDT or Rotary Encoder (0-10V or 4-20mA signal)
- Materials: Aluminum body, Stainless Steel trim, Viton or Buna-N seals
- Leak Rate: < 5 x 10^-7 std cc/sec
Functional Features:
- Linear Flow Characteristic: Provides predictable pressure control based on valve opening percentage.
- Fast Response: Quick opening/closing to handle process transients (e.g., rapid venting).
- Position Control: Capable of operating in closed-loop mode for precise pressure setpoint control.
- Bakeable: Capable of withstanding high temperatures (up to 150°C) for chamber bake-out processes.
Application Scenarios:
- Pressure Control: Maintaining specific process pressure during plasma etching or deposition.
- Chamber Pump-down: Regulating the speed of evacuation to prevent thermal shock or wafer damage.
- Venting: Controlled introduction of nitrogen to bring the chamber to atmosphere.
- Load Lock Operations: Managing pressure differentials between the load lock and the main transfer chamber.
