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Gasonics 95-0483
Product Description: This part number is commonly associated with a Vacuum Pump Exhaust Filter or a Scrubber Cartridge. It is a critical component for the abatement system of Gasonics tools, ensuring that hazardous or corrosive byproducts from the plasma or wet processes are neutralized before being released into the facility exhaust.
Technical Specifications:
- Component Type: Chemical Filter / Abatement Cartridge
Detailed content
- Housing Material: Stainless Steel 316L
- Filter Media: Activated Carbon, Zeolite, or specialized chemical absorbents (for HF, NOx, SOx)
- Particle Rating: 0.3 micron HEPA filtration stage
- Flow Rate: Rated for specific pump capacities (e.g., 50 CFM to 200 CFM)
- Temperature Rating: Up to 150°C
Functional Features:
- Toxic Gas Abatement: Chemically neutralizes acidic or toxic gases generated during ashing or etching (e.g., HF from fluorocarbon plasma).
- Odor Control: Removes ozone and other noxious odors.
- Particulate Filtration: Traps any particles that might be carried over in the exhaust stream.
- Pressure Drop Indicator: Some versions include ports to monitor filter clogging.
Application Scenarios:
- Plasma Strip Tools: Filtering exhaust from oxygen/CF4 plasma ashers.
- Wet Etch Benches: Scrubbing acid vapors (HCl, H2SO4 mists) from wet stations.
- CVD/PVD Tools: Filtering unreacted precursors and byproducts.
- Environmental Safety: Ensuring compliance with local environmental health and safety regulations.
