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Gasonics 15132-01
Product Description: This part number typically identifies a Sensor Assembly, specifically a Capacitance Manometer or a Pirani Gauge used for vacuum measurement. Accurate pressure control is vital in plasma processing, and this sensor provides the feedback signal to the throttle valve.
Technical Specifications:
- Component Type: Pressure Transducer / Vacuum Gauge
- Sensor Technology: Capacitive Diaphragm (for high accuracy) or Pirani (for rough vacuum)
Detailed content
- Measurement Range: 0 – 10 Torr, 0 – 1000 Torr, or 0 – 1000 mTorr (depending on variant)
- Output Signal: 0-10V DC or RS-485 digital
- Accuracy: ±0.5% of reading
- Materials: Stainless steel 316L wetted parts
- Electrical Connection: D-Sub or circular military connector
Functional Features:
- High Precision: Provides accurate pressure readings essential for repeatable plasma density and etch rates.
- Fast Response: Rapid response time allows for closed-loop pressure control during process transitions.
- Gas Independence: Capacitance manometers are largely independent of gas type, providing accurate readings across different chemistries.
- Analog/Digital Interface: Compatible with standard tool controllers and PLCs.
Application Scenarios:
- Process Control: Used as the primary control sensor for maintaining process pressure in plasma chambers.
- Interlock Systems: Provides signals to shut down the tool if pressure exceeds safe limits.
- Leak Detection: Used in baseline pressure checks to identify vacuum leaks.
- R&D Diagnostics: Used in test setups to characterize pumping speeds and gas flows.
