1. Optical & Electrical Parameters:
   • Laser Source: 633 nm wavelength (helium-neon laser).
   • Sensor Type: CMOS array for interferometric signal detection.
   • Input Voltage: 24 V DC ±10%.
   • Power Consumption: 25 W.
2. Environmental & Mechanical:
   • Operating Temperature: 0°C to +40°C (extended range: -40°C to +85°C for storage).
   • Protection Rating: IP54 (dust/water-resistant).
   • Dimensions: 229 mm × 114 mm × 29 mm.
   • Weight: 1.2 kg.
3. Interfaces & Integration:
   • Bus Interface: VME-compliant.
   • Communication Protocols: EtherCAT, CANopen, Profibus-DP (up to 12 Mbit).
   • I/O Channels: 32 digital I/O points; 4 dedicated servo control channels.

Functional Features

1. Nanometer-Level Precision:
   • Utilizes laser interferometry to achieve sub-nanometer resolution for surface topography, roughness, and contour measurements.
2. Real-Time Signal Processing:
   • Integrated DSP and FPGAs enable high-speed data acquisition (62.5 µs update rate) and closed-loop feedback.
3. Dual-Axis Synchronization:
   • Simultaneously measures X/Y displacements and angular deviations, critical for complex optical alignment.
4. Robust Environmental Tolerance:
   • IP54 rating ensures reliable operation in industrial environments with dust or moisture.
5. Auto-Reconfiguration:
   • Automatically reinstates settings after module replacement via ToolboxST software.

Application Scenarios

1. Semiconductor Manufacturing:
   • Measures wafer flatness, chip topography, and lithography mask alignment (±0.1 µm accuracy).
2. Precision Optics:
   • Characterizes lens surface profiles, prism angles, and mirror reflectivity in telescope/camera production.
3. Aerospace & Automotive:
   • Validates turbine blade contours, fuel injector dimensions, and aerodynamic component tolerances.
4. Research & Development:
   • Enables quantum optics experiments and material science studies (e.g., thin-film thickness analysis).
5. Industrial Automation:
   • Integrates with CNC machines for real-time toolpath calibration and quality control.

Compatible Ecosystem

1. Hardware Integration:
   • Servo Drivers: WSVO modules for valve position control.
   • Terminal Boards: TSVO boards for I/O signal routing.
   • Controllers: GE Mark VIe, KUKA KR C2 cabinets.
2. Software Tools:
   • ZYGO MASS Suite: CODESYS-based environment for IEC 61131-3 programming and diagnostics.
   • ToolboxST: Configures Ethernet parameters and motion profiles.

Installation & Maintenance

1. Deployment Guidelines:
   • Mount on DIN rails with ≥50 mm clearance for heat dissipation.
   • Isolate from high-vibration machinery to prevent signal interference.
2. Preventive Maintenance:
   • Bi-annual inspections: Clean laser optics, verify encoder cables, and test redundant Ethernet ports (ENet1/ENet2).
3. Troubleshooting:
   • Signal Drift: Recalibrate laser interferometry paths.
   • Overheating: Ensure ambient temperature ≤40°C and adequate ventilation.

Certifications & Support

• Compliance: CE, UL, RoHS.
• Warranty: 12-month manufacturer coverage.
• Technical Support: Global service via ZYGO-certified engineers; expedited shipping (e.g., DHL/SF Express).